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Course syllabus

The lectures covers the basic physical mechanisms of the interaction between solid matter and electromagnetic radiation, electrons and ions. Also fundamental aspects of diffraction and contrast theory are being covered. In addition the principles and usage of microprobes, electron spectroscopy techniques (AES and XPS), X-ray diffraction (XRD), electron microscopy (SEM and TEM), light optical microscopy (LOM), time-of-flight secondary ion mass spectrometry (ToF-SIMS) and ellipsometry are described. The course consists of 8 lectures and 8 laborations covering the following analysis techniques;

  • Light Optical Microscopy (LOM)
  • Ellipsometry
  • Scanning Electron Microscopy (SEM)
  • Transmission Electron Microscopy (TEM)
  • Electron Diffraction (ED)
  • X-ray Diffraction and X-ray Reflectivity and Diffuse Scattering (XRD + XRR)
  • Auger Electron Spectroscopy (AES)
  • X-ray Photo Electron Spectroscopy (XPS)
  • Energy Dispersive X-ray Analysis (EDX)
  • Secondary Ion Mass Spectrometry (ToF-SIMS).

Responsible for this page: Fredrik Eriksson
Last updated: 01/10/17