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CVD of sp2-hybridized boron nitride

The crystal structures of sp2-hybridized BN; h-BN (left), r-BN (right)

 

Boron nitride (BN) can form compounds with either sp3-hybridized or sp2-hybridized bonds. The most studied sp3-hybridized phase is cubic (c-BN), but there is also a wurtzite phase (w-BN) that is an analogue to the III−nitrides AlN, GaN, and InN. The sp2-hybridized BN (sp2-BN) can crystallize into two different phases: hexagonal (h-BN) and rhombohedral (r-BN). These two phases can be regarded as two different stacking sequences of the same basal plane, where h-BN and r-BN have a lattice parameter along the c-axis of 6.656 Å and 10.000 Å, respectively.

The CVD research on sp2-BN focuses on fundamental understanding of the epitaxial growth of sp2-BN on sapphire and SiC using thermally activated CVD. The research is done in close collaboration with the Thin Film Physics division at Linköping University

 

Publications:

Initial stages of growth and the influence of temperature during chemical vapor deposition of sp2-BN films

M. Chubarov, H. Pedersen, H. Högberg, Zs. Czigany, A. Henry
Journal of Vacuum Science and Technology A 33, 061520 (2015)

 

Polytype Pure sp 2 -BN Thin Films As Dictated by the Substrate Crystal Structure

M. Chubarov, H. Pedersen, H. Högberg, Zs. Czigany, M. Garbrecht, A. Henry
Chemistry of Materials 27, 1640-1645 (2015)

 

Chemical vapour deposition of epitaxial rhombohedral BN thin films on SiC substrates

M. Chubarov, H. Pedersen, H. Högberg, Zs. Czigany, A. Henry
CrystEngComm 16, 5430-5436 (2014) (FULL OPEN ACCESS)

 

On the effect of silicon in CVD of sp2 hybridized boron nitride thin films

M. Chubarov, H. Pedersen, H. Högberg, A. Henry
CrystEngComm 15, 455-458 (2013) (FULL OPEN ACCESS)

 

Growth of high quality epitaxial rhombohedral boron nitride
M. Chubarov, H. Pedersen, H. Högberg, J. Jensen, A. Henry
Crystal Growth and Design 12, 3215 (2012)

 

On the effect of water and oxygen in chemical vapor deposition of boron nitride
H. Pedersen, M. Chubarov, H. Högberg, J. Jensen, A. Henry
Thin Solid Films 520, 5889 (2012)
(OPEN ACCESS VERSION)

 

Epitaxial CVD growth of sp²-hybridized boron nitride using aluminum nitride as buffer layer
M. Chubarov, H. Pedersen, H. Högberg, V. Darakchieva, J. Jensen, P. O. Å. Persson, A. Henry
physica status solidi (RRL) 5, 397 (2011)
(OPEN ACCESS VERSION)


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Last updated: 01/13/16