Ellipsometry is an old technique with nice properties. By monitoring the effect a surface (with or without an organic film) has on elliptically polarized light, one can obtain optical properties of the surface. Thicknesses of films on the surface can be deduced by optical modeling. We have in our facilities two types of ellipsometers; ordinary null-ellipsometers and one imaging null-ellipsometer. We mainly use these ellipsometers for thickness-evaluations of different organic films. Our imaging ellipsometer (EP3 from Nanofilm Surface Analysis) is used for evaluating protein-array chips, an example is shown in figure 1.
Responsible for this page: Erik Martinsson
Last updated: 06/11/15