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Introduction

The Device Physics Laboratory is a clean room facility at IFM and facilitates work for PhD students, scientist and external users of companies on micro fabrication, micro electronics, organic electronics, etc. The facility is a class 100, 1000 and 10000 cleanroom with 200 m2 working surface divided in different departments: Lithography, characterisation, wet processing, oxidation-diffusion, deposition (CVD + sputter) and (conjugated) polymer processing of soft lithography for bio molecular and organic electronics.


Responsible for this page: Chun-Xia Du
Last updated: 11/22/16