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IFM

Introduction

The Device Physics Laboratory is a clean room facility at IFM and facilitates work for PhD students, scientist and external users of companies on micro fabrication, micro electronics, organic electronics, etc. The facility is a class 100 and 1000 cleanroom with 200 m2 working surface divided in different departments: Lithography, characterisation, wet processing, oxidation-diffusion, deposition (CVD + sputter) and (conjugated) polymer processing of soft lithography for bio molecular and organic electronics.










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Last updated: 2007-12-03

Org.nr: 202100-3096
VAT nr: SE202100309601
Plusgiro: 18 34 15-9